Wafer Bonding Seal Ring

17 21 it consists of a polymer membrane as a packaging cover and a polymer sealing ring.

Wafer bonding seal ring. Thara srinivasan lecture 25. 1 surrounds the main device area 110 and is parallel to the outer perimeter of the die. The pair of seal rings for example is arranged in parallel. It is found that the principal cause of the partial bonding is due to non flat bcb sealing ring caused by multilayer bcb coating process.

Here a cap wafer is manufactured with a gold ring metallization and the mems wafer provides a silicon frame area for the metallurgical reaction. The cap wafer was equipped with 200 μm deep dry etched cavities and electro plated au seal rings around them. The seal ring 150 as shown in fig. The seal ring in one embodiment includes a pair of seal rings i e a first seal ring 150a and a second seal ring 150b.

Sealing rings after eutectic wafer bonding. The bottom wafer generally was a 300µ m thick 4 si wafer having a low bow and a low total thickness variation ttv. A material a b c d e f cap dicing. One such technique is wafer level packaging wlp which forms a hermetically sealed cavity in which the device element is situated.

Wafer to wafer bonding and packaging dr. The polymer caps can be implemented through sacrificial etching and a wafer level transfer technique. Metal layer bonding pattern seal rings and bond pads photolithographically eutectic bonding uses eutectic point in metal si phase diagrams to form silicides au and si have eutectic point at 363 c. Finally both cap and interposer wafers were bonded together using a wafer to wafer bonder and an adapted ausn soldering process scheme.

Bcb sealing ring has shown partial bonding or full bonding depending on its flatness. Due to the concave regions un etched bond rings when the cap wafer comes into a contact with a planar device wafer only the concave seal area un etched area gets bonded. Deposited on patterned si bonding ring. This paper presents the effect of bcb sealing ring flatness on bcb bonding for wafer scale bcb cap transfer packaging.

Article osti 1107804 title wafer level packaging with compression controlled seal ring bonding author farino anthony j abstractnote a device may be provided in a sealed package by aligning a seal ring provided on a first surface of a first semiconductor wafer in opposing relationship with a seal ring that is provided on a second surface of a second semiconductor wafer and. Most of the metal seal bonding technologies require metal frames on both wafers as shown in figure 32 1. With advances in wafer bonding technology this process has been widely applied to the fabrication of mems devices. As a solution bcb dry etching has been proposed to.

The bond seal area is defined by etching the backside of a cap wafer by 2 µm.